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Dursox® SilcoTek

Dursox® (patent info at is a chemically protective hydrophilic barrier of amorphous silicon and oxygen that prevents substrate ions from leaching into process streams. Applied via chemical vapor deposition (CVD), Dursox® is required when both a robust and chemically compatible surface are critical.

What’s this coating used for?

Dursox is an inert corrosion resistant silicon barrier coating formulated especially for high purity semiconductor fabrication processes.

Dursox improves corrosion resistance by 10x or more while reducing ion contamination in semiconductor processes.

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